MKS Instruments to Buy Carlyle’s Atotech for $5.1 Billion (3)

MKS Instruments Inc., a maker of equipment for the chip industry, agreed to acquire specialty chemicals group Atotech Ltd. for about $5.1 billion in cash and stock.

The Andover, Massachusetts-based company will offer $16.20 in cash and 0.0552 MKS shares for each Atotech share, according to a statement Thursday, which confirmed an earlier Bloomberg News report. Carlyle Group Inc., the buyout firm that owns 79% of Atotech, has agreed to vote in favor of the transaction.

Shares of MKS, which fell as much as 6.1% in U.S. trading Thursday, closed down 4% to $170.77, giving the company a ...