Lam Research Moves to Invalidate Inpria Chip-Making Tech Patent

Lam Research Corp. petitioned the US Patent and Trademark Office to review and cancel one of three chip-making technology patents JSR Corp.’s Inpria sued it for allegedly infringing.

The semiconductor company told the Patent Trial and Appeal Board that US Patent No. 9,823,564 should be canceled because a previous patent application anticipated the invention’s claims. The examiner also overlooked the Ph.D. thesis of one of the inventors that renders the majority of claims obvious, Lam Research said in its petition.

The ‘564 patent is titled “Patterned inorganic layers, radiation based patterning compositions and corresponding methods” and relates to technology ...