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Environment & Energy Report

Perfluorinated Chemicals Critically
Needed, Manufacturers Tell EPA

July 8, 2015, 4:00 AM

Continued access to perfluorinated chemicals is essential for the semiconductor and other industries, companies, trade associations and law firms have told the agency in comments on a proposed rule by the Environmental Protection Agency that would restrict the uses of such chemicals.

Perfluorinated chemicals covered by the EPA’s proposed rule “provide critical acidity, surfactancy and anti-reflectivity properties for photoacid generators, photoresist polymers, anti-reflective coatings and other processes related to semiconductor manufacturing,” wrote the Intel Corp., describing itself as the largest semiconductor integrated circuit manufacturer with a $55.6 billion revenue in 2014.

The EPA also must allow the continued purchase, importation...

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